Axcelis

Axcelis Technologies, Inc. (Axcelis) designs, manufactures and services ion implantation, dry strip and other processing equipment used in the fabrication of semiconductor chips. In addition to equipment, the Company provides aftermarket service and support, including spare parts, equipment upgrades, maintenance services and customer training. During the year ended December 31, 2008, the Company owned 50% of the equity of SEN Corporation (SEN), a producer of ion implantation equipment in Japan. SEN licenses technology from the Company for certain ion implantation products and has exclusive rights ...


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